Description
- Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
- All models conform to safety standards.
- Conforms to UL and SEMI specifications, CE marking.
Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating liquid |
---|---|---|---|---|---|
HRZ | -20 to 40 20 to 90 -20 to 90 |
15kW | ±0.1? | Water-cooled refrigeration | Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution |